Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing
نویسندگان
چکیده
منابع مشابه
Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing
Measurement tasks of modern microand nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios. There is an open requirement for nanometre-resolving 3-D capable sensors and corresponding 3-D positioning systems to operate the sensors for 3-D measurements. A 3-D probing system based on electrical interaction is presented which...
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ژورنال
عنوان ژورنال: Journal of Sensors and Sensor Systems
سال: 2015
ISSN: 2194-878X
DOI: 10.5194/jsss-4-199-2015